S5000-10 Floor-standing Sorter (up to 200 mm)

The S5010 is a recipe-driven, high-throughput wafer sorting system with an efficient radial footprint. The system can process wafers between 100mm and 200mm, at the speed of >350 wafers per hour (WPH) when reading laser marks and 750 WPH when transferring between cassettes. It boasts an impressive 10,000 hours Meantime Between Failures and 10,000 cycles Mean Wafers Between Assists.